Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter

C. R. Raum; R. N. Tait; R. C. Gauthier

doi:10.1117/12.778779

13 February 2008 Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter

C. R. Raum, R. N. Tait, R. C. Gauthier

Author Affiliations +

Proceedings Volume 6898, Silicon Photonics III; 68981E (2008) https://doi.org/10.1117/12.778779
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

A silicon-on-insulator (SOI) rib waveguide integrated with a Bragg grating and nickel chromium heating elements has been fabricated. The heaters enable tuning of the Bragg wavelength through a thermo-optic effect. As the temperature is increased, the Bragg wavelength also increases due to the increasing silicon refractive index and effective mode index of the guide. The device is designed so that an additional processing step can remove the buried oxide beneath the grating to form a suspended waveguide. This structure would further decrease the power input required to tune the filter, and would allow the waveguide to buckle at a critical temperature. In this work the un-released structure is fabricated and mounted in a standard dual in-line pin (DIP) package to allow optical and electrical characterization. Test results demonstrating thermo-optic tuning show a 1 nm shift in Bragg wavelength with a power input of 58 mW.

Citation Download Citation

C. R. Raum, R. N. Tait, and R. C. Gauthier "Fabrication and characterization of a thermo-mechanically tunable grating-assisted suspended waveguide filter", Proc. SPIE 6898, Silicon Photonics III, 68981E (13 February 2008); https://doi.org/10.1117/12.778779

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available