MEMS deformable mirrors for space and defense applications

T. G. Bifano; Paul Bierden; Steven A. Cornelissen

doi:10.1117/12.781676

30 April 2008 MEMS deformable mirrors for space and defense applications

T. G. Bifano, Paul Bierden, Steven A. Cornelissen

Proceedings Volume 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II; 695914 (2008) https://doi.org/10.1117/12.781676
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

This paper presents recent progress in the development of MEMS deformable mirrors for space and defense applications. Two different MEMS DM designs are described, along with their corresponding uses in space and defense systems. The designs build on a conventional surface micromachining technology and feature an electrostatic actuation architecture pioneered at Boston University. Key performance characteristics are presented. The device characteristics make them useful for a range of wavefront control applications that include low-power optical modulation, adaptive optics imaging, and laser communication, on both ground-based and space-based platforms.

Citation Download Citation

T. G. Bifano, Paul Bierden, and Steven A. Cornelissen "MEMS deformable mirrors for space and defense applications", Proc. SPIE 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, 695914 (30 April 2008); https://doi.org/10.1117/12.781676

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