Laser removal of thin layers for surface cleaning

Ileana Apostol; D. Apostol; V. Damian; Iuliana Iordache; F. Garoi; E. Capello

doi:10.1117/12.801968

29 April 2008 Laser removal of thin layers for surface cleaning

Ileana Apostol, D. Apostol, V. Damian, Iuliana Iordache, F. Garoi, E. Capello

Proceedings Volume 7007, INDLAS 2007: Industrial Laser Applications; 70070I (2008) https://doi.org/10.1117/12.801968
Event: INDLAS 2007: Industrial Laser Applications, 2007, Bran, Romania

Abstract

In micro- and nano- device fabrication technology, localized material removal is one of the basic operations for structure formation. Classical methods for structure formation on the surface of a silicon wafer are based mainly on chemical processing, starting with photo etching, chemical etching, and chemical-mechanical linearization. In order to propose new methods of higher quality from the point of view of both environment protection and processing quality, we have studied the possibility of thin films controlled removal under the action of laser radiation. We are presenting some qualitative results of laser induced surface removal of polymer thin films, of interest for microelectronic industry (e.g. photoresist), under the action of different laser sources. As laser sources we have used the most spread and commercially available laser systems with different wavelengths and pulse lengths in order to compare their action on the surfaces and to establish the characteristic parameters for removal of thin layers for surface cleaning.

Citation Download Citation

Ileana Apostol, D. Apostol, V. Damian, Iuliana Iordache, F. Garoi, and E. Capello "Laser removal of thin layers for surface cleaning", Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070I (29 April 2008); https://doi.org/10.1117/12.801968

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available