Multilayer alumina and titania optical coatings prepared by atomic layer deposition

Nemo Biluš Abaffy; Peter Evans; Gerry Triani; Dougal McCulloch

doi:10.1117/12.794618

10 September 2008 Multilayer alumina and titania optical coatings prepared by atomic layer deposition

Nemo Biluš Abaffy, Peter Evans, Gerry Triani, Dougal McCulloch

Proceedings Volume 7041, Nanostructured Thin Films; 704109 (2008) https://doi.org/10.1117/12.794618
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

The microstructure and optical properties of alumina and titania multilayer coatings prepared using atomic layer deposition (ALD) has been investigated. The titania layers were prepared using TiCl₄+H₂O as the precursors while two different precursors, Al(CH₃)₃+H₂O and AlCl₃+H₂O, were used to deposit the alumina layers. The results show that ALD can be used to produce amorphous, stoichiometric alumina and titania thin films with uniform thicknesses at low temperatures (120 °C). An antireflective coating design based on 4 alternating layers of titania and alumina was prepared and the resulting reflectance compared to theoretical calculations. The results demonstrate that ALD is a suitable technique for the deposition of optical thin films at temperatures compatible with thermally sensitive substrates.

Citation Download Citation

Nemo Biluš Abaffy, Peter Evans, Gerry Triani, and Dougal McCulloch "Multilayer alumina and titania optical coatings prepared by atomic layer deposition", Proc. SPIE 7041, Nanostructured Thin Films, 704109 (10 September 2008); https://doi.org/10.1117/12.794618

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available