Hot embossing is an effective way to achieve high-quality Microstructures at low cost. At present papers, the effects of
geometry and shear on filling profile and polymer deformation have studied through experiments or computations. In
this paper, the parameters on different polymer deformation modes: single peak, dual peak and embossing stage have
researched. Especially it is referred that the mainly reasons of embossing stage phenomenon are the ratio of cavity width
to height 2w/hi, the ratio of cavity width to tool width w/(w+s), and shear thinning. In addition, the temperature variation
of polymer due to internal friction has discussed with evolution of imprint speed. And the simulation results prove a
better coincidence with experiments.
|