Silicon nanophotonic waveguides and their applications

Wim Bogaerts; Liu Liu; Shankar Kumar Selvaraja; Pieter Dumon; Joost Brouckaert; Dirk Taillaert; Diedrik Vermeulen; Gunther Roelkens; Dries Van Thourhout; Roel Baets

doi:10.1117/12.803440

11 November 2008 Silicon nanophotonic waveguides and their applications

Wim Bogaerts, Liu Liu, Shankar Kumar Selvaraja, Pieter Dumon, Joost Brouckaert, Dirk Taillaert, Diedrik Vermeulen, Gunther Roelkens, Dries Van Thourhout, Roel Baets

Author Affiliations +

Proceedings Volume 7134, Passive Components and Fiber-based Devices V; 71341O (2008) https://doi.org/10.1117/12.803440
Event: Asia-Pacific Optical Communications, 2008, Hangzhou, China

Abstract

We discuss silicon photonic wires and components based on this technology, such as filters based on ring resonators, interferometers or arrayed waveguide gratings. The devices are fabricated using standard CMOS technology, including 193nm lithography. We also discuss their application in a number of demonstrator devices within different application fields.

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Wim Bogaerts, Liu Liu, Shankar Kumar Selvaraja, Pieter Dumon, Joost Brouckaert, Dirk Taillaert, Diedrik Vermeulen, Gunther Roelkens, Dries Van Thourhout, and Roel Baets "Silicon nanophotonic waveguides and their applications", Proc. SPIE 7134, Passive Components and Fiber-based Devices V, 71341O (11 November 2008); https://doi.org/10.1117/12.803440

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