Interfaces roughness cross correlation properties and light scattering of optical thin films

Yong-qiang Pan; Zhen-sen Wu; Ling-xia Hang

doi:10.1117/12.828623

20 May 2009 Interfaces roughness cross correlation properties and light scattering of optical thin films

Yong-qiang Pan, Zhen-sen Wu, Ling-xia Hang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72830V (2009) https://doi.org/10.1117/12.828623
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

In order to study optical thin films interfaces roughness cross correlation properties and light scattering, theoretical models of optical thin films interfaces roughness light scattering are concisely presented. Furthermore, influence of interfaces roughness cross-correlation properties to light scattering was analyzed by total backscattering. Moreover, TiO₂ single optical films thickness, substrate roughness of K9 glass and ion beam assisted deposition (IBAD) technique effect on interface roughness cross correlation properties were studied by experiments, respectively. The results showed that theoretical results obtained by integrating vector light scattering were agreed well with experimental results. The interfaces roughness cross-correlation decrease with the increase of films thickness or with the decrease of substrates roughness. When ion beam assisted deposition was used, a high degree of cross-correlated can be obtained.

Citation Download Citation

Yong-qiang Pan, Zhen-sen Wu, and Ling-xia Hang "Interfaces roughness cross correlation properties and light scattering of optical thin films", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830V (20 May 2009); https://doi.org/10.1117/12.828623

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