Study on the technology of sinusoidal phase modulating interferometry based on Fourier transform algorithm

Guotian He; Min Wu; Shuchen Liu; Linzhi Deng

doi:10.1117/12.828672

20 May 2009 Study on the technology of sinusoidal phase modulating interferometry based on Fourier transform algorithm

Guotian He, Min Wu, Shuchen Liu, Linzhi Deng

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831M (2009) https://doi.org/10.1117/12.828672
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Sinusoidal phase modulation interference survey technology is an advanced interference measuring technique in international front. Through introducing the piezoelectric ceramics (PZT) of sinusoidal vibration in Michelson interferometer reference path of light ,we carry on the modulation to the reference light, which produces modulation item along with the time sine change of interference signal. The demodulation is carried on based on Fourier analysis method to obtain the phase of corresponding object to measure the interference signal. This article proposes the algorithm of Fourier analysis method to carry on the solution to the interference signal, discusses the influence of the algorithm on measuring accuracy and compares it with traditional method. Experimental result indicates the sinusoidal phase modulation interference survey technology is an effective interference measuring technique with high accuracy.

Citation Download Citation

Guotian He, Min Wu, Shuchen Liu, and Linzhi Deng "Study on the technology of sinusoidal phase modulating interferometry based on Fourier transform algorithm", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831M (20 May 2009); https://doi.org/10.1117/12.828672

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