Real-time compensation for interpolation error of Moiré fringes signal

Weiying Piao; Yibao Yuan; Feng Zhang

doi:10.1117/12.828688

20 May 2009 Real-time compensation for interpolation error of Moiré fringes signal

Weiying Piao, Yibao Yuan, Feng Zhang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831X (2009) https://doi.org/10.1117/12.828688
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Lacking effective error compensation method is one important reason that limits the measurement precision of optical grating. A real-time compensation method for eliminating the interpolation error of moiré fringes signal is proposed. The interpolation error is caused by zero offset; nonorthogonal phase and unequal amplitude of two signals. The principle is introduced as follows: first, tracking eight characteristic points on a grating signal period. The zero offset of sine signal is separated from amplitude of characteristic points, so it can be compensated; then tracking the compensative signal, and the zero offset of cosine signal can also be separated and compensated. Tracking the compensative signal continually, the unequal amplitude of two signals and the nonorthogonal phase can be separated and compensated respectively. The three above errors can be totally compensated in no more than three grating signal periods. Through experiments the effect of this method is proved.

Citation Download Citation

Weiying Piao, Yibao Yuan, and Feng Zhang "Real-time compensation for interpolation error of Moiré fringes signal", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831X (20 May 2009); https://doi.org/10.1117/12.828688

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