Off-axis low-coherence interferometry for surface topology measurement

Yves Delacrétaz; Daniel Boss; Florian Lang; Christian Depeursinge

doi:10.1117/12.870742

13 September 2010 Off-axis low-coherence interferometry for surface topology measurement

Yves Delacrétaz, Daniel Boss, Florian Lang, Christian Depeursinge

Proceedings Volume 7387, Speckle 2010: Optical Metrology; 738715 (2010) https://doi.org/10.1117/12.870742
Event: Speckle 2010, 2010, Florianapolis, Brazil

Abstract

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

Citation Download Citation

Yves Delacrétaz, Daniel Boss, Florian Lang, and Christian Depeursinge "Off-axis low-coherence interferometry for surface topology measurement", Proc. SPIE 7387, Speckle 2010: Optical Metrology, 738715 (13 September 2010); https://doi.org/10.1117/12.870742

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