High-precision alignment technique through quality image analysis

J. Arasa; E. Oteo; P. Blanco

doi:10.1117/12.827283

17 June 2009 High-precision alignment technique through quality image analysis

J. Arasa, E. Oteo, P. Blanco

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73892L (2009) https://doi.org/10.1117/12.827283
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

The proper alignment of the individual elements is a crucial point in the final performance of an optical system. The alignment technique we present uses the image formation of a point sources array to detect the misalignments of an imaging system. We have displaced the analysis plane from the exit pupil plane to the image plane, where the PSFs functions are captured on a sensor. The PSFs are large enough to be sensitive to the misalignments and we are able to detect them using image analysis techniques. The proposed technique is a solution when more than one field position is necessary to obtain a well-balanced quality function over all the field of view. We have been studying this method on a particular collection of optical systems with decentering and rotation errors, achieving an accuracy of 0.1mm for decentering and 0.01° for rotation.

Citation Download Citation

J. Arasa, E. Oteo, and P. Blanco "High-precision alignment technique through quality image analysis", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892L (17 June 2009); https://doi.org/10.1117/12.827283

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