Auto-focus imaging systems with MEMS deformable mirrors

Meng-Hsuan Lin; Hsin-Ta Hsieh; Wei-Yao Hsu; Yuan-Chieh Cheng; Cheng-Hsien Wu; Guo-Dung J. Su

doi:10.1117/12.825650

21 August 2009 Auto-focus imaging systems with MEMS deformable mirrors

Meng-Hsuan Lin, Hsin-Ta Hsieh, Wei-Yao Hsu, Yuan-Chieh Cheng, Cheng-Hsien Wu, Guo-Dung J. Su

Proceedings Volume 7428, Current Developments in Lens Design and Optical Engineering X; 74280Q (2009) https://doi.org/10.1117/12.825650
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

Miniaturization is the key point to design image system for portable devices. Motor-driven lens technique is the traditional way to achieve auto-focus and zoom functions. Nevertheless, systems with moving parts are difficult to downscale. A solution presented in this paper has more potential to downscale and maintain high optical performance simultaneously by combining reflective optics and MEMS deformable mirror. The system we designed with MEMS deformable mirror is a 2M pixel auto-focus image system which is only 5.4mm in thickness before packaging and 6.7mm in thickness after packaging.

Citation Download Citation

Meng-Hsuan Lin, Hsin-Ta Hsieh, Wei-Yao Hsu, Yuan-Chieh Cheng, Cheng-Hsien Wu, and Guo-Dung J. Su "Auto-focus imaging systems with MEMS deformable mirrors", Proc. SPIE 7428, Current Developments in Lens Design and Optical Engineering X, 74280Q (21 August 2009); https://doi.org/10.1117/12.825650

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