Design of co-path scanning long trace profiler for measurement of x-ray space optical elements

Li Shun; Gong Yan; Zhang Wei; Zhao Yang

doi:10.1117/12.885415

28 December 2010 Design of co-path scanning long trace profiler for measurement of x-ray space optical elements

Li Shun, Gong Yan, Zhang Wei, Zhao Yang

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754421 (2010) https://doi.org/10.1117/12.885415
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system, we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used, the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also, it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane.

Citation Download Citation

Li Shun, Gong Yan, Zhang Wei, and Zhao Yang "Design of co-path scanning long trace profiler for measurement of x-ray space optical elements", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754421 (28 December 2010); https://doi.org/10.1117/12.885415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available