Fabrication of micro- and nanostructures in thin metallic films by femtosecond laser ablation

Vygantas Mizeikis; Saulius Juodkazis; Kai Sun; Hiroaki Misawa

doi:10.1117/12.843074

16 February 2010 Fabrication of micro- and nanostructures in thin metallic films by femtosecond laser ablation

Vygantas Mizeikis, Saulius Juodkazis, Kai Sun, Hiroaki Misawa

Proceedings Volume 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III; 75910J (2010) https://doi.org/10.1117/12.843074
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We report maskless microfabrication of periodic structures in thin metallic films by femtosecond laser ablation. Two-dimensional (2D) triangular arrays of circular apertures with diameter of about 0.6-0.8 μm and a lattice period of 1.0 and 2.0 μm were fabricated by single- and multiple laser pulse ablation of 35 nm thick gold films sputtered on glass substrates. Optical transmission spectra of the fabricated samples exhibit transmission bands at infrared wavelengths. Theoretical modeling of the optical properties by Finite-Difference Time-Domain (FDTD) technique indicates that these bands are associated with localized and propagating surface plasmon (SP) modes. FDTD simulations also indicate substantial resonant enhancement of the near-field intensity at the metal's surface. Laser ablation of thin metallic films is therefore a promising route for fast prototyping of planar metallic micro- and nano-structures applicable as frequency-selective surfaces (FSS) and SP substrates.

Citation Download Citation

Vygantas Mizeikis, Saulius Juodkazis, Kai Sun, and Hiroaki Misawa "Fabrication of micro- and nanostructures in thin metallic films by femtosecond laser ablation", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910J (16 February 2010); https://doi.org/10.1117/12.843074

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