Semiconductor nanomembranes for stacked and flexible photonics

Weidong Zhou; Zhenqiang Ma; Hongjun Yang; Li Chen; Weiquan Yang; Zexuan Qiang; Guoxuan Qin; Huiqing Pang; Santhad Chuwongin; Deyin Zhao

doi:10.1117/12.841426

16 February 2010 Semiconductor nanomembranes for stacked and flexible photonics

Weidong Zhou, Zhenqiang Ma, Hongjun Yang, Li Chen, Weiquan Yang, Zexuan Qiang, Guoxuan Qin, Huiqing Pang, Santhad Chuwongin, Deyin Zhao

Author Affiliations +

Proceedings Volume 7606, Silicon Photonics V; 76060U (2010) https://doi.org/10.1117/12.841426
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We report here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and inorganic flexible photonics.

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Weidong Zhou, Zhenqiang Ma, Hongjun Yang, Li Chen, Weiquan Yang, Zexuan Qiang, Guoxuan Qin, Huiqing Pang, Santhad Chuwongin, and Deyin Zhao "Semiconductor nanomembranes for stacked and flexible photonics", Proc. SPIE 7606, Silicon Photonics V, 76060U (16 February 2010); https://doi.org/10.1117/12.841426

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