Science and technology of MEMS/NEMS resonators: Si versus diamond platform materials

Mingke Xiong; I-Tsang Wu; Mian Wei; Jing Wang

doi:10.1117/12.852893

5 May 2010 Science and technology of MEMS/NEMS resonators: Si versus diamond platform materials

Mingke Xiong, I-Tsang Wu, Mian Wei, Jing Wang

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76791O (2010) https://doi.org/10.1117/12.852893
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Having recently been demonstrated at frequencies over 1GHz with measured Q's>10,000^1-6, MEMS/NEMS resonators in silicon, SiC and CVD diamond structural materials have great potential for enabling resonant mass sensing down to zeptogram resolution as well as on-chip high-Q passives needed in wireless communication systems for frequency generation, translation and filtering. However, the acceptance of such devices for RF applications in present-day transceivers has been hindered so far by several remaining issues, including: (1) a frequency range lower than 5 GHz, (2) higher motional impedances than normally exhibited by macroscopic high-Q resonators, (3) limited linearity and power handling ability, and (4) insufficient frequency repeatability and stability. This paper reviews several material-centric strategies for alleviating the aforementioned issues. Given that resonance frequency is generally proportional to the acoustic velocity while energy dissipation and Q is also a strong function of the material properties, several deviceoriented and system-level performance-enhancing technologies will be discussed. Both capacitively-transduced and piezoelectrically-transduced resonators will be discussed with a particular emphasis on the employment of transducers with improved electromechanical coupling coefficient as the device-level method for lowering the motional impedance.

Citation Download Citation

Mingke Xiong, I-Tsang Wu, Mian Wei, and Jing Wang "Science and technology of MEMS/NEMS resonators: Si versus diamond platform materials", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791O (5 May 2010); https://doi.org/10.1117/12.852893

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
15 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Resonators

Microelectromechanical systems

Acoustics

Silicon

Diamond

Nanoelectromechanical systems

Silicon carbide

Show All Keywords

Keywords/Phrases

Search In:

Publication Years