Pixelated spectral filter for integrated focal plane array in the long-wave IR

S. A. Kemme; R. R. Boye; A. A. Cruz-Cabrera; R. D. Briggs; T. R. Carter; S. Samora

doi:10.1117/12.849756

5 May 2010 Pixelated spectral filter for integrated focal plane array in the long-wave IR

S. A. Kemme, R. R. Boye, A. A. Cruz-Cabrera, R. D. Briggs, T. R. Carter, S. Samora

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76791P (2010) https://doi.org/10.1117/12.849756
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

We present the design, fabrication, and characterization of a pixelated, hyperspectral arrayed component for Focal Plane Array (FPA) integration in the Long-Wave IR. This device contains tens of pixels within a single super-pixel which is tiled across the extent of the FPA. Each spectral pixel maps to a single FPA pixel with a spectral FWHM of 200nm. With this arrayed approach, remote sensing data may be accumulated with a non-scanning, "snapshot" imaging system. This technology is flexible with respect to individual pixel center wavelength and to pixel position within the array. Moreover, the entire pixel area has a single wavelength response, not the integrated linear response of a graded cavity thickness design. These requirements bar tilted, linear array technologies where the cavity length monotonically increases across the device.

Citation Download Citation

S. A. Kemme, R. R. Boye, A. A. Cruz-Cabrera, R. D. Briggs, T. R. Carter, and S. Samora "Pixelated spectral filter for integrated focal plane array in the long-wave IR", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791P (5 May 2010); https://doi.org/10.1117/12.849756

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