Design and fabrication of super mirrors on the Zerodur substrate

Hyun-Ju Cho; Young-Zip Jeon

doi:10.1117/12.860296

19 August 2010 Design and fabrication of super mirrors on the Zerodur substrate

Hyun-Ju Cho, Young-Zip Jeon

Proceedings Volume 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI; 778611 (2010) https://doi.org/10.1117/12.860296
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Super mirror is a high reflectance mirror with very low absorption and scattering losses. We carefully measured the surface roughness of Zerodur substrate using phase shift interferometer and atomic force microscope, and compared it with the scattering of the mirror. The absorption of the mirror was measured by cavity ring-down method, and its results were correlated to the thin film structure. To avoid the UV degradation which comes from the He-Ne plasma, we carefully select the mirror fabrication material, and design the high reflectance mirror. Finally, mirror was fabricated by ion beam sputtering method and its optical properties were measured.

Citation Download Citation

Hyun-Ju Cho and Young-Zip Jeon "Design and fabrication of super mirrors on the Zerodur substrate", Proc. SPIE 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI, 778611 (19 August 2010); https://doi.org/10.1117/12.860296

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