Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection

Cornelius Hahlweg; Burkhard Meißner; Wenjing Zhao; Hendrik Rothe

doi:10.1117/12.860170

1 September 2010 Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection

Cornelius Hahlweg, Burkhard Meißner, Wenjing Zhao, Hendrik Rothe

Author Affiliations +

Proceedings Volume 7792, Reflection, Scattering, and Diffraction from Surfaces II; 77920A (2010) https://doi.org/10.1117/12.860170
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

The use of ultra short range Lidar techniques for measuring volume scatter behaviour of semi-transparent materials is investigated. Modern integrated circuits allow the design of low cost solutions for short to ultra short range Lidar applications such as combined multi GHz interferometry and FMCW in power domain. Besides typical in-door applications such as range finders, refined an explicitly tuned configurations can serve as volume scatterometers as well. First system concepts and designs based on off the shelf components are presented. Further, as an appendix for the interested reader, we continue to publish the translation of a chapter on multiple reflections in dioptric systems from Lambert's Photometria.

Citation Download Citation

Cornelius Hahlweg, Burkhard Meißner, Wenjing Zhao, and Hendrik Rothe "Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection", Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920A (1 September 2010); https://doi.org/10.1117/12.860170

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