In situ long trace profiler for measurement of Wolter type-I mirror

Tian Gang Cui; Yong Gang Wang; Wen Sheng Ma; Bo Chen

doi:10.1117/12.863366

1 September 2010 In situ long trace profiler for measurement of Wolter type-I mirror

Tian Gang Cui, Yong Gang Wang, Wen Sheng Ma, Bo Chen

Proceedings Volume 7801, Advances in Metrology for X-Ray and EUV Optics III; 78010L (2010) https://doi.org/10.1117/12.863366
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab, an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism, structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6_μrad rms for slope error with a stability of 1.33_μrad during the whole measurement period. This can meet further fabrication requirements.

Citation Download Citation

Tian Gang Cui, Yong Gang Wang, Wen Sheng Ma, and Bo Chen "In situ long trace profiler for measurement of Wolter type-I mirror", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010L (1 September 2010); https://doi.org/10.1117/12.863366

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