Principle of a novel displacement sensor based on infrared He-Ne laser

Zhengqi Zhao; Shulian Zhang; Yan Li

doi:10.1117/12.868878

11 November 2010 Principle of a novel displacement sensor based on infrared He-Ne laser

Zhengqi Zhao, Shulian Zhang, Yan Li

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78551H (2010) https://doi.org/10.1117/12.868878
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Principle of using infrared dual-frequency He-Ne laser as a displacement sensor is presented. By inserting birefringent elements into laser cavity, one laser beam is splitted into two orthogonally polarized laser beams. When cavity length is changing, two beams appear one after another. Power turning curves are formed, which provide a method of displacement measurement. Compared to red He-Ne laser, infrared He-Ne laser has the feature of higher gain and corresponding stability. By counting numbers of equal-intensity points and combining subdivision techniques, displacement sensor based on infrared dual-frequency He-Ne laser is expected to afford measurement range of 100mm with resolution of 10 nm.

Citation Download Citation

Zhengqi Zhao, Shulian Zhang, and Yan Li "Principle of a novel displacement sensor based on infrared He-Ne laser", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551H (11 November 2010); https://doi.org/10.1117/12.868878

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