Image registration for stability testing of MEMS

Nargess Memarsadeghi; Jacqueline Le Moigne; Peter N. Blake; Peter A. Morey; Wayne B. Landsman; Victor J. Chambers; Samuel H. Moseley

doi:10.1117/12.872076

7 February 2011 Image registration for stability testing of MEMS

Nargess Memarsadeghi, Jacqueline Le Moigne, Peter N. Blake, Peter A. Morey, Wayne B. Landsman, Victor J. Chambers, Samuel H. Moseley

Author Affiliations +

Proceedings Volume 7873, Computational Imaging IX; 78730G (2011) https://doi.org/10.1117/12.872076
Event: IS&T/SPIE Electronic Imaging, 2011, San Francisco Airport, California, United States

Abstract

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging, astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

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Nargess Memarsadeghi, Jacqueline Le Moigne, Peter N. Blake, Peter A. Morey, Wayne B. Landsman, Victor J. Chambers, and Samuel H. Moseley "Image registration for stability testing of MEMS", Proc. SPIE 7873, Computational Imaging IX, 78730G (7 February 2011); https://doi.org/10.1117/12.872076

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