3D features measurement using YieldStar, an angle resolved polarized scatterometer

Anne-Laure Charley; Philippe Leray; Koen D'havé; Shaunee Cheng; Paul Hinnen; Fahong Li; Peter Vanoppen; Mircea Dusa

doi:10.1117/12.881276

20 April 2011 3D features measurement using YieldStar, an angle resolved polarized scatterometer

Anne-Laure Charley, Philippe Leray, Koen D'havé, Shaunee Cheng, Paul Hinnen, Fahong Li, Peter Vanoppen, Mircea Dusa

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79712E (2011) https://doi.org/10.1117/12.881276
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Metrology on 3D features like contact holes (CH) is more challenging than on lines and spaces (L/S) structures especially if one wants to have profile information. Scatterometry has been widely used on L/S structures and has enabled characterization of lithographic features providing with critical dimensions (CD) as well as feature height and side wall angle. In this paper, we will present the application of scatterometry to the measurement of 3D structures using an angle resolved polarized scatterometer: ASML YieldStar S-100. Contact hole measurements will be presented and correlation to standard metrology tools will be shown. Measurement capability will be discussed in terms of reproducibility, calculation time, sensitivity of the parameters of interest and correlation between them leading to a proper model choice. Finally initial results on more complex 3D features (line ends, brick walls,...) will be presented.

Citation Download Citation

Anne-Laure Charley, Philippe Leray, Koen D'havé, Shaunee Cheng, Paul Hinnen, Fahong Li, Peter Vanoppen, and Mircea Dusa "3D features measurement using YieldStar, an angle resolved polarized scatterometer", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79712E (20 April 2011); https://doi.org/10.1117/12.881276

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available