Invited Paper Plasma-Spectra In Materials Processing By Excimer Lasers

R. Poprawe; M. Wehner; G. Brown; G. Herziger

doi:10.1117/12.941241

22 September 1987 Invited Paper Plasma-Spectra In Materials Processing By Excimer Lasers

R. Poprawe, M. Wehner, G. Brown, G. Herziger

Proceedings Volume 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics; (1987) https://doi.org/10.1117/12.941241
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Materials processing utilizing excimer lasers is enjoying rapidly increasing interest due to the growing number of promising fields of application. Especially processes like ablation and micro-processing gain more and more attention. However, little is konwn about the mechanisms involved in the interaction of UV-radiation with matter and experimental data on process parameters such as ablation rate, wavelength, puls rate of operation etc. are not sufficient for controlled applications with high quality and reproducibility. Therefore plain and clear criteria have to be found in order to garantee the desired standard.

Citation Download Citation

R. Poprawe, M. Wehner, G. Brown, and G. Herziger "Invited Paper Plasma-Spectra In Materials Processing By Excimer Lasers", Proc. SPIE 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, (22 September 1987); https://doi.org/10.1117/12.941241

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