A metrological scanning probe microscope based on a quartz tuning fork detector

Bakir Babic; Christopher H. Freund; Malcolm Lawn; John R. Miles; Jan Herrmann

doi:10.1117/12.884567

1 June 2011 A metrological scanning probe microscope based on a quartz tuning fork detector

Bakir Babic, Christopher H. Freund, Malcolm Lawn, John R. Miles, Jan Herrmann

Proceedings Volume 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 80360P (2011) https://doi.org/10.1117/12.884567
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

We give an overview of the design of a metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometre scale and the realization of the SI metre at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented.

Citation Download Citation

Bakir Babic, Christopher H. Freund, Malcolm Lawn, John R. Miles, and Jan Herrmann "A metrological scanning probe microscope based on a quartz tuning fork detector", Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 80360P (1 June 2011); https://doi.org/10.1117/12.884567

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