An interference microfilter array with tunable spectral response for each pixel

Frida E. Strömqvist Vetelino; Ali A. Abtahi; Peter B. Griffin; Ricky J. Morgan; Usha Raghuram; Francisco Tejada

doi:10.1117/12.883822

20 May 2011 An interference microfilter array with tunable spectral response for each pixel

Frida E. Strömqvist Vetelino, Ali A. Abtahi, Peter B. Griffin, Ricky J. Morgan, Usha Raghuram, Francisco Tejada

Proceedings Volume 8048, Algorithms and Technologies for Multispectral, Hyperspectral, and Ultraspectral Imagery XVII; 80480M (2011) https://doi.org/10.1117/12.883822
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

A standing wave spectrometer is turned into a wavelength tunable band-pass filter by the addition of a reflective coating. It results in the standing wave filter (SWF), a miniaturized Fabry-Perot band-pass filter with a semi-transparent detector that can be constructed into a pixel-tunable focal plane array, suitable for hyperspectral imaging applications. The asymmetric Fabry-Perot cavity is formed between the reflective coating and a tunable mirror, originally part of the spectrometer. The predicted performance of the SWF is optimized through modeling based on the matrix formalism used in thin film optics and with FDTD simulations. The SWF concept is taken from an ideal device to a focal plane array design that was fabricated with 40 micron pixels using semi-conductor processing technology. First-light spectra measured from the 100 pixel Standing Wave Filter array agree with predictions and prove the concept.

Citation Download Citation

Frida E. Strömqvist Vetelino, Ali A. Abtahi, Peter B. Griffin, Ricky J. Morgan, Usha Raghuram, and Francisco Tejada "An interference microfilter array with tunable spectral response for each pixel", Proc. SPIE 8048, Algorithms and Technologies for Multispectral, Hyperspectral, and Ultraspectral Imagery XVII, 80480M (20 May 2011); https://doi.org/10.1117/12.883822

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KEYWORDS

Sensors

Reflectivity

Mirrors

Coating

Absorption

Silicon

Reflectors

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