A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces

W. G. Ophey

doi:10.1117/12.941377

28 September 1987 A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces

W. G. Ophey

Proceedings Volume 0805, Optical Components and Systems; (1987) https://doi.org/10.1117/12.941377
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

The shape of an aspherical surface can optically be measured by focusing a small light spot on its surface. Scanning in a line across the surface and going through the apex of the surface, one can interferometrically detect its shape. This paper describes the performance and limitations of such a scanning-spot interferometer. Special attention is paid to the ability to measure very steep aspherical surfaces.

Citation Download Citation

W. G. Ophey "A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces", Proc. SPIE 0805, Optical Components and Systems, (28 September 1987); https://doi.org/10.1117/12.941377

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