Transmission sphere calibration and its current limits

Pengqian Yang; Jia Xu; Jianqiang Zhu; Stefan Hippler

doi:10.1117/12.889458

27 May 2011 Transmission sphere calibration and its current limits

Pengqian Yang, Jia Xu, Jianqiang Zhu, Stefan Hippler

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80822L (2011) https://doi.org/10.1117/12.889458
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

When testing the optical surface errors with an interferometer, it is always important to determine the residual errors in the interferometer optics. The calibration of reference optic for proper accuracy is very important issue if the precise phase measurement results are to be obtained using interferometer. A simple ball calibration method is discussed and the sufficient number of measurements for the ball averaging calibration is determined. Further we analysis some errors, which limit the performance of the calibration method by using a combination of both ray optics and wave optics approach.

Citation Download Citation

Pengqian Yang, Jia Xu, Jianqiang Zhu, and Stefan Hippler "Transmission sphere calibration and its current limits", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822L (27 May 2011); https://doi.org/10.1117/12.889458

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available