Optical vibration measurements of cross coupling effects in capacitive micromachined ultrasonic transducer arrays

Erlend Leirset; Astrid Aksnes

doi:10.1117/12.889835

27 May 2011 Optical vibration measurements of cross coupling effects in capacitive micromachined ultrasonic transducer arrays

Erlend Leirset, Astrid Aksnes

Author Affiliations +

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80823N (2011) https://doi.org/10.1117/12.889835
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Optical vibration measurement systems are excellent tools for characterizing ultrasonic transducers. This paper presents measurements on immersed arrays of capacitive ultrasonic transducers (CMUTs) using a heterodyne interferometer. The interferometer allows measurements of vibrations from DC up to 1 GHz with a noise floor of ~1pm/√Hz. Previously CMUTs have been characterized in air. The transducer is intended for intravascular use. Therefore the CMUTs were characterized in the transparent fluids kerosene and rapeseed oil that have acoustic properties closer to blood. The optical measurements on immersed CMUTs were validated by assessing the measurement errors caused by the acousto optic effects in the fluid. When immersed there is significant cross coupling between individual CMUTs within an array. Simulations presented here indicate that this causes an acoustic wave mode that is bound to the interface between the CMUTs and the fluid. This is confirmed by measurements of the phase velocity and attenuation coefficient of this wave. The measurement results indicate that the wave exists up to a maximum frequency and that the attenuation constant increases with increasing frequency. Rapeseed oil causes a significantly larger attenuation coefficient than kerosene, which most probably is due to a considerable difference in fluid viscosities. There was a mismatch between the simulated and measured phase velocity for low frequencies. It is likely that the cause of this is coupling between the fluid CMUT interface waves and Lamb waves in the substrate of the CMUT array. Measurements performed with the heterodyne interferometer have confirmed the presence of dispersive waves bound to the surface of the transducer by directly showing their propagation along the array. The setup has also characterized the bound waves by measuring dispersion relations.

Citation Download Citation

Erlend Leirset and Astrid Aksnes "Optical vibration measurements of cross coupling effects in capacitive micromachined ultrasonic transducer arrays", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80823N (27 May 2011); https://doi.org/10.1117/12.889835

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