Fourier planes vs. Scheimpflug principle in microscopic and scatterometric devices

Cornelius Hahlweg; Wenjing Zhao; Hendrik Rothe

doi:10.1117/12.893470

16 September 2011 Fourier planes vs. Scheimpflug principle in microscopic and scatterometric devices

Cornelius Hahlweg, Wenjing Zhao, Hendrik Rothe

Proceedings Volume 8127, Optical Modeling and Performance Predictions V; 812708 (2011) https://doi.org/10.1117/12.893470
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

The present paper is understood as a continuation of our paper on the utilization of the Scheimpflug-principle in scatterometric devices. Imaging scatterometers in principle gather the fourier image of the illuminated spot, which in microscopy would be the primary diffraction image. Therefore imaging scatterometers can be used as microscopes as well, which only requires an additional positive lens or equivalent mirror. It is obvious that combined designs are interesting in surface inspection: because of the loss of phase information in both direct and scatter image, there is still non redundant information besides the intersection set of both images. For the design of such combined devices it is of high interest to identify the fourier images. While a more or less paraxial dioptric device in orthogonal view has well defined fourier planes, in an off axis device with paraboloid or elliptical mirrors the fourier image is concerned by the Scheimpflug relations, which shall be subject of the present paper.

Citation Download Citation

Cornelius Hahlweg, Wenjing Zhao, and Hendrik Rothe "Fourier planes vs. Scheimpflug principle in microscopic and scatterometric devices", Proc. SPIE 8127, Optical Modeling and Performance Predictions V, 812708 (16 September 2011); https://doi.org/10.1117/12.893470

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