Spectroscopic ellipsometry: metrology for photovoltaics from the nanoscale to gigawatts

Sylvain Marsillac; Robert W. Collins

doi:10.1117/12.909628

21 February 2012 Spectroscopic ellipsometry: metrology for photovoltaics from the nanoscale to gigawatts

Sylvain Marsillac, Robert W. Collins

Proceedings Volume 8256, Physics, Simulation, and Photonic Engineering of Photovoltaic Devices; 825613 (2012) https://doi.org/10.1117/12.909628
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

Non-destructive, non-invasive measurement and monitoring tools, such as spectroscopic ellipsometry (SE), are needed at all scales of thin film photovoltaic (PV) technology development - from the nanometer scale that describes the electronic and physical structure of materials fabricated in research laboratories to the gigawatt scale that requires the large-area uniformity of materials made in mass production. In the research laboratory, real time SE during materials fabrication has provided insights into the structural and electronic property evolution, and dielectric functions of the thin films. Here we will present such results for the growth of thin film PV materials of various compositions and properties, including those used in the demanding I-III-VI₂ solar cell technology. In the PV manufacturing plant, mapping SE can be used to evaluate the uniformity of thickness and properties of the layers in full scale PV panels and even in completed modules. Here we will present representative results for the uniformity of CdS, the window layer in CdTe PV technology, which reached 1.4 GW annual production in 2010.

Citation Download Citation

Sylvain Marsillac and Robert W. Collins "Spectroscopic ellipsometry: metrology for photovoltaics from the nanoscale to gigawatts", Proc. SPIE 8256, Physics, Simulation, and Photonic Engineering of Photovoltaic Devices, 825613 (21 February 2012); https://doi.org/10.1117/12.909628

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available