Silicon nanomembranes for high-performance flexible photonic interconnects and devices

Harish Subbaraman; Xiaochuan Xu; Nassibe Rahimi; Amir Hosseini; Ray T. Chen

doi:10.1117/12.906852

2 February 2012 Silicon nanomembranes for high-performance flexible photonic interconnects and devices

Harish Subbaraman, Xiaochuan Xu, Nassibe Rahimi, Amir Hosseini, Ray T. Chen

Proceedings Volume 8267, Optoelectronic Interconnects XII; 82670H (2012) https://doi.org/10.1117/12.906852
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio (>4000) and long (>5cm) strip waveguides, band engineered slow light (n_g > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (~5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI.

Citation Download Citation

Harish Subbaraman, Xiaochuan Xu, Nassibe Rahimi, Amir Hosseini, and Ray T. Chen "Silicon nanomembranes for high-performance flexible photonic interconnects and devices", Proc. SPIE 8267, Optoelectronic Interconnects XII, 82670H (2 February 2012); https://doi.org/10.1117/12.906852

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