A novel linear displacement sensor

Ji-sen Yang; Jing Zhang; Xi-hou Chen; Tian-heng Zhang

doi:10.1117/12.903781

15 November 2011 A novel linear displacement sensor

Ji-sen Yang, Jing Zhang, Xi-hou Chen, Tian-heng Zhang

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210P (2011) https://doi.org/10.1117/12.903781
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

With development of time grating technology in the past 10 years, the theory of using time to measure spatial displacement has been completed greatly. In the study of time grating, one novel linear displacement sensor is proposed based on the measurement principles of time grating. The measurement principles of linear displacement are similar to that of angular displacement. Both of them need one endless coordinate with uniform velocity. The theory of linear AC motor is used, and the three-phase winding with equal division space of 120° and three-phase exciting signal with uniform time are utilized to generate the endless moving coordinate with uniform velocity. The magnetic traveling wave arises from the left endpoint and disappears in the right endpoint, and it travels pole pitch distance of W during the periodic time of T with the uniform velocity. When magnetic traveling wave passes by the static probe and the moving probe, the electric signals will be induced on the winding, respectively. Therefore, the linear displacement can be achieved by comparing the phase between the two output induced signals from he static probe and the moving probe. Furthermore, in order to improve the machining technique, four kinds of winding framework are designed to employ. The experimental results show that advantages and disadvantages both exist in the design methods and the precision of experiment results reaches ±2μm. The next study plan is to choose the most excellent design method through further experiments and improve the precision of displacement sensor greatly.

Citation Download Citation

Ji-sen Yang, Jing Zhang, Xi-hou Chen, and Tian-heng Zhang "A novel linear displacement sensor", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210P (15 November 2011); https://doi.org/10.1117/12.903781

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KEYWORDS

Sensors

Magnetism

Time metrology

Control systems

Reticles

Error analysis

Lead

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