Complementary patterning demonstration with e-beam direct writer and spacer DP process of 11nm node

Hideaki Komami; Kenji Abe; Keita Bunya; Hideaki Isobe; Masahiro Takizawa; Masaki Kurokawa; Akio Yamada; Hietami Yaegashi; Kenichi Oyama; Shohei Yamauchi

doi:10.1117/12.915821

21 March 2012 Complementary patterning demonstration with e-beam direct writer and spacer DP process of 11nm node

Hideaki Komami, Kenji Abe, Keita Bunya, Hideaki Isobe, Masahiro Takizawa, Masaki Kurokawa, Akio Yamada, Hietami Yaegashi, Kenichi Oyama, Shohei Yamauchi

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 832313 (2012) https://doi.org/10.1117/12.915821
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

We successfully demonstrate complementary patterning with self-aligned double patterning (SADP) and currently used e-beam direct writer (EBDW). The complementary patterning is achieved with not only positive type pattern for gate layer but also negative type one for 1st metal (M1) layer at 11nm node. The e-beam exposure is performed by Advantest. SADP process before e-beam exposure and etching after e-beam exposure are performed by Tokyo Electron. This paper also reports EBDW applicability to complementary patterning for 8nm node and beyond in the light of overlay and resolution, and improving plans including shot number reduction.

Citation Download Citation

Hideaki Komami, Kenji Abe, Keita Bunya, Hideaki Isobe, Masahiro Takizawa, Masaki Kurokawa, Akio Yamada, Hietami Yaegashi, Kenichi Oyama, and Shohei Yamauchi "Complementary patterning demonstration with e-beam direct writer and spacer DP process of 11nm node", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 832313 (21 March 2012); https://doi.org/10.1117/12.915821

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