Paper
8 May 2012 Partially athermalized waveguide gratings
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Abstract
We investigated high efficiency organic-inorganic hybrid sub-wavelength binary diffraction gratings as partially athermalized waveguides. The performance of the grating is evaluated in terms of low spectral shifts in heating environment. The efficiency was determined to be least effective in temperature environment around room temperature. The spectral characteristics of waveguide remain thermally stable by selecting optical grade polymer materials with high thermal expansion coefficients, subsequently deposited by high index, amorphous TiO2 thin films by atomic layer deposition (ALD) process. The spectral shifts towards longer and shorter wavelengths were investigated in terms of two main parameters, thermal expansion coefficient (TEC) and thermo-optic coefficient (TOC) respectively. Realization of partially athermalized waveguides are described by complete agreement in theoretically calculated and experimentally measured results in the temperature range of 100 °C.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Muhammad Rizwan Saleem, Seppo Honkanen, and Jari Turunen "Partially athermalized waveguide gratings", Proc. SPIE 8428, Micro-Optics 2012, 842817 (8 May 2012); https://doi.org/10.1117/12.922070
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KEYWORDS
Titanium dioxide

Temperature metrology

Atomic layer deposition

Polymers

Refractive index

Diffraction gratings

Waveguides

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