Paper
13 September 2012 Interferometer inspection of local defect type Young-Chalmers
Author Affiliations +
Abstract
Using the analogy of the double-slit experiment developed by Young and using interferometric technique developed by Chalmers, we built an interferometric arrangement that can analyze local defects of an optical surface. With a reflective spatial light modulator (RSLM) controlled by a PC, two apertures are open each time, and the apertures became as secondary light sources, producing interference pattern for specific zones for the surface under test. The interference pattern is observed, and storage into a computer by using a CCD camera. Finally the results are compared with the results obtained using a Fizeau commercial interferometer.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benito Canales-Pacheco, Alejandro Cornejo-Rodriguez, Fermín Granados-Agustin, Esteban Rueda-Soriano, and Pedro Cebrian-Xochihuila "Interferometer inspection of local defect type Young-Chalmers", Proc. SPIE 8494, Interferometry XVI: Applications, 84940O (13 September 2012); https://doi.org/10.1117/12.930049
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KEYWORDS
Interferometers

Interferometry

Light sources

Reflectivity

CCD cameras

Defect inspection

Inspection

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