Three-dimensional dual-band stacked microbolometer design using resistive dipoles and slots

Hoo Kim; Dean P. Neikirk

doi:10.1117/12.2016405

11 June 2013 Three-dimensional dual-band stacked microbolometer design using resistive dipoles and slots

Hoo Kim, Dean P. Neikirk

Proceedings Volume 8704, Infrared Technology and Applications XXXIX; 870419 (2013) https://doi.org/10.1117/12.2016405
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

A dual-band microbolometer with separate absorption of each wavelength band would be desirable for multispectral applications. In addition, a three dimensional (3D) stacked structure would be advantageous for size and integration in focal plane arrays. We present designs for a 3D stacked dual-band microbolometer based on the in-band and out-of-band reflection and transmission characteristics of resistive dipoles and slots. The mechanism of individual absorption in each layer of a dual-band microbolometer is analyzed and simulated to allow the resistive slot layer to efficiently absorb the LWIR band while a superposed resistive dipole layer absorbs the MWIR band. The top dipole layer is designed to have peak absorption at 5 μm, with a second underlying slot layer and mirror layer designed to have peak absorption at 10 μm. The stacked combination of two different types of layers provides highly efficient wavelength selective absorption, yielding calculated power absorption efficiency of nearly 100 % for both LWIR and MWIR bands.

Citation Download Citation

Hoo Kim and Dean P. Neikirk "Three-dimensional dual-band stacked microbolometer design using resistive dipoles and slots", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 870419 (11 June 2013); https://doi.org/10.1117/12.2016405

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available