Two methods of pumping for eximer laser pulse-stretching

Ekaterina A. Shershunova; Maxim V. Malashin; Sergey I. Moshkunov; Vladimir A. Yamschikov; Vladislav Yu. Khomich

doi:10.1117/12.2014508

15 March 2013 Two methods of pumping for eximer laser pulse-stretching

Ekaterina A. Shershunova, Maxim V. Malashin, Sergey I. Moshkunov, Vladimir A. Yamschikov, Vladislav Yu. Khomich

Proceedings Volume 8770, 17th International School on Quantum Electronics: Laser Physics and Applications; 87700C (2013) https://doi.org/10.1117/12.2014508
Event: Seventeenth International School on Quantum Electronics: Laser Physics and Applications, 2012, Nessebar, Bulgaria

Abstract

Stretching of laser pulses allows to improve eximer laser output characteristics and to prolong a laser lifetime. Two methods of laser pumping are proposed in this paper for stretching of laser pulses. Using a special electric circuit in a pumping generator scheme allowed to double a pulse duration for a small ArF-laser. For the first time a pumping mode with periodically damping voltage across a discharge gap was successfully realized for increasing of KrF-laser pulse duration.

Citation Download Citation

Ekaterina A. Shershunova, Maxim V. Malashin, Sergey I. Moshkunov, Vladimir A. Yamschikov, and Vladislav Yu. Khomich "Two methods of pumping for eximer laser pulse-stretching", Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); https://doi.org/10.1117/12.2014508

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