Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy

A. Giglia; S. Mukherjee; N. Mahne; S. Nannarone; P. Jonnard; K. Le Guen; Y.-Y. Yuan; J.-M. André; Z.-S. Wang; H.-C. Li; J.-T. Zhu

doi:10.1117/12.2017252

3 May 2013 Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy

A. Giglia, S. Mukherjee, N. Mahne, S. Nannarone, P. Jonnard, K. Le Guen, Y.-Y. Yuan, J.-M. André, Z.-S. Wang, H.-C. Li, J.-T. Zhu

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Proceedings Volume 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III; 87770I (2013) https://doi.org/10.1117/12.2017252
Event: SPIE Optics + Optoelectronics, 2013, Prague, Czech Republic

Abstract

Here is presented the spectroscopic study of the evolution of the first buried interfaces of a B₄C capped Co/Mo₂C multilayer mirror induced by thermal treatment up to 600°C. This kind of study is typically performed to simulate the response of multilayer optics working in extreme conditions, as for instance when irradiated by new high brilliance sources as Free Electron Lasers. In fact, the efficiency of multilayers is related to the optical contrast between the alternating high and low density layers, and then to the degree of interdiffusion and the creation or evolution of interface compounds. The analysis has been performed at the Co L₂₃ edge with different soft x-ray spectroscopic techniques including diffuse and specular reflectivity, total electron and fluorescent yield at the BEAR beamline at Elettra (Trieste) (http://www.elettra.trieste.it/elettra-beamlines/bear.html). The presentation is focused on the spectroscopic results obtained by soft x-ray standing wave enhanced photoemission (XSW) from the Mo 3d, B 1s, C 1s, O 1s core levels by using a photon energy close to the Co L₂₃ edge and corresponding to the first Bragg peak of the multilayer. The experimental results have been compared with simulations to obtain information both on the chemical state (e.g. oxidation state) and interface morphology in terms of profiles of distribution of elements and interdiffusion of B, oxidized B and C in the interface region. In summary, it is possible to conclude in favour of a good stability of the multilayer in the investigated temperature range, as confirmed by the good performance in terms of reflectivity. These results confirm the usefulness of XSW for this kind analysis of multilayer optics.

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A. Giglia, S. Mukherjee, N. Mahne, S. Nannarone, P. Jonnard, K. Le Guen, Y.-Y. Yuan, J.-M. André, Z.-S. Wang, H.-C. Li, and J.-T. Zhu "Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy", Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87770I (3 May 2013); https://doi.org/10.1117/12.2017252

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