Wavelength modulation-based method for interference phase detection with reduced optical complexity

Šimon Řeřucha; Martin Šarbort; Zdeněk Buchta; Bretislav Mikel; Radek Šmíd; Martin Čížek; Petr Jedlička; Jan Řerucha; Josef Lazar; Ondřej Číp

doi:10.1117/12.2020678

13 May 2013 Wavelength modulation-based method for interference phase detection with reduced optical complexity

Šimon Řeřucha, Martin Šarbort, Zdeněk Buchta, Bretislav Mikel, Radek Šmíd, Martin Čížek, Petr Jedlička, Jan Řerucha, Josef Lazar, Ondřej Číp

Author Affiliations +

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87883C (2013) https://doi.org/10.1117/12.2020678
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Although the laser interferometry represents the most precise class of techniques in the field of precise measurement of geometrical quantities, its wide use in measurement systems is still accompanied by many unresolved challenges. One of these challenges is the complexity of underlying optical systems. We present a novel approach to the interference phase detection - fringe subdivision - in the homodyne laser interferometry that aims at reduction of the optical complexity while the resolution is preserved. Our method employs a series of computational steps to infer a pair of signals in quadrature that allows to determine the interference phase with a sub-nanometre resolution from an interference signal from a non-polarising interferometer sampled by a single photodetector. The complexity trade-off is the use of laser beam with frequency modulation capability. The method was experimentally evaluated on a Michelson interferometer-based free-space setup and its performance has been compared to a traditional homodyne detection method. The results indicate the method is a feasible al ternative for the traditional homodyne detection since it performs with comparable accuracy (< 0.5nm standard deviation), especially where the optical setup complexity is principal issue and the modulation of laser beam is not a heavy burden, for instance in multi-axis measurement systems or laser diode based systems.

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Šimon Řeřucha, Martin Šarbort, Zdeněk Buchta, Bretislav Mikel, Radek Šmíd, Martin Čížek, Petr Jedlička, Jan Řerucha, Josef Lazar, and Ondřej Číp "Wavelength modulation-based method for interference phase detection with reduced optical complexity", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883C (13 May 2013); https://doi.org/10.1117/12.2020678

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