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Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic
substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional
structures due to their low power consumption, fast and stable time response, small dimensions and possibility of
embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type
gas sensors based on ZnO and WO3 nanostructures. ZnO:Al nanorods with good cristallinity were obtained with
electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method.
The sensors were built as a nanowire network. WO3 films with nanocrystalline surface were manufactured by deposition
of a three layer WO3/W/WO3 structure by RF sputtering and successive annealing of the structure in appropriate
temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors
characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional
conductometric type sensors.
Wojciech Maziarz,Tadeusz Pisarkiewicz,Artur Rydosz,Kinga Wysocka, andGrzegorz Czyrnek
"Metal oxide nanostructures for gas detection", Proc. SPIE 8902, Electron Technology Conference 2013, 890226 (25 July 2013); https://doi.org/10.1117/12.2030298
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Wojciech Maziarz, Tadeusz Pisarkiewicz, Artur Rydosz, Kinga Wysocka, Grzegorz Czyrnek, "Metal oxide nanostructures for gas detection," Proc. SPIE 8902, Electron Technology Conference 2013, 890226 (25 July 2013); https://doi.org/10.1117/12.2030298