Research status and developing trends of grating nanometer measuring technology

Minlan Jiang; Huifeng Li; Xiaodong Wang; Jianguo Shen

doi:10.1117/12.2035685

10 October 2013 Research status and developing trends of grating nanometer measuring technology

Minlan Jiang, Huifeng Li, Xiaodong Wang, Jianguo Shen

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891631 (2013) https://doi.org/10.1117/12.2035685
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

Along with the progress of rating and signal processing technology, because of its advantages and wide application, grating measuring technology has become a research hotspot in the precision measuring field. Nanometer measuring has become urgently to solve problem with the need of industrial development and scientific research from sub micrometer to nanometer precision measurement. This paper systematically discusses its research status, existing problems, developing trends and other issues about grating nanometer measuring technology. It provides references to grating nanometer measuring technology researches and its development.

Citation Download Citation

Minlan Jiang, Huifeng Li, Xiaodong Wang, and Jianguo Shen "Research status and developing trends of grating nanometer measuring technology", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891631 (10 October 2013); https://doi.org/10.1117/12.2035685

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available