Parabasal thin element approximation for the analysis of the diffractive optical elements

Huiying Zhong; Site Zhang; Frank Wyrowski; Muhammad Ahmad; Hagen Schweitzer

doi:10.1117/12.2040294

7 March 2014 Parabasal thin element approximation for the analysis of the diffractive optical elements

Huiying Zhong, Site Zhang, Frank Wyrowski, Muhammad Ahmad, Hagen Schweitzer

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 897711 (2014) https://doi.org/10.1117/12.2040294
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

The thin element approximation is an efficient algorithm to analyze diffractive optical elements (DOEs), whose feature size is large enough compared with the working wavelength. However, the thin element approximation is only valid under the condition of normal illumination. We hereby extend an algorithm, which is called the parabasal thin element approximation, to include the non-perpendicular illumination. More specifically, the thin element approximation is valid for paraxial incident beam, while the parabasal thin element approximation is valid for parabasal beam. In this article, we present the algorithm of the parabasal thin element approximation and compare the result with that of rigorous method. All the simulations are based on field tracing and done with the optical software VirtualLab™.

Citation Download Citation

Huiying Zhong, Site Zhang, Frank Wyrowski, Muhammad Ahmad, and Hagen Schweitzer "Parabasal thin element approximation for the analysis of the diffractive optical elements", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897711 (7 March 2014); https://doi.org/10.1117/12.2040294

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