Towards the fast DSA: improvement of computational performance of the DSA model

Azat Latypov

doi:10.1117/12.2046048

28 March 2014 Towards the fast DSA: improvement of computational performance of the DSA model

Azat Latypov

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 904923 (2014) https://doi.org/10.1117/12.2046048
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

The approaches to improve the performance of the DSA (directed self-assembly) computational models are being reviewed and discussed. We start by reviewing the computational complexity of a rigorous self-consistent field theory (SCFT) DSA model and also the currently utilized ways to reduce this computational complexity and improve its performance, as implemented in GLOBALFOUNDRIES DSA Solver. We proceed with presenting new approximations in the SCFT model making it possible to improve the computational performance of the DSA model further.

Citation Download Citation

Azat Latypov "Towards the fast DSA: improvement of computational performance of the DSA model", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904923 (28 March 2014); https://doi.org/10.1117/12.2046048

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