Study on the fabrication and releasing of sacrificial layer of micro-cantilever

Liang Liu; Weiguo Liu; Huan Liu

doi:10.1117/12.2054012

16 December 2013 Study on the fabrication and releasing of sacrificial layer of micro-cantilever

Liang Liu, Weiguo Liu, Huan Liu

Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90680V (2013) https://doi.org/10.1117/12.2054012
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Polyimide is used as sacrificial layer material during the research on bi-material micro-cantilever structure. Contrasted with other sacrificial layer materials, polyimide is marked with excellent properties, like good insulation, big coefficient of elasticity, big coefficient of linear expansion and outstanding mechanical property. This dissertation has studied the preparing process of sacrificial layer, like sacrificial layer imaging and solidifying, and different methods to release sacrificial layer and how to control all kinds of parameters to obtain the best suspension. Finally, the optimized process parameters are obtained.

Citation Download Citation

Liang Liu, Weiguo Liu, and Huan Liu "Study on the fabrication and releasing of sacrificial layer of micro-cantilever", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680V (16 December 2013); https://doi.org/10.1117/12.2054012

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