Fabrication and performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 thin films

Ouyang Cheng; Wei Zhou; Jing Wu; Junhao Chu; Zhiming Huang

doi:10.1117/12.2051725

16 December 2013 Fabrication and performance of uncooled infrared bolometer based on Mn_1.56Co_0.96Ni_0.48O₄ thin films

Ouyang Cheng, Wei Zhou, Jing Wu, Junhao Chu, Zhiming Huang

Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90681K (2013) https://doi.org/10.1117/12.2051725
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Mn-Co-Ni-O bolometer with spinel structure has been extensively studied as a low resistivity and high sensitivity negative temperature coefficient material for decades. In this paper, the fabrication process and the performance of uncooled infrared bolometer based on Mn_1.56Co_0.96Ni_0.48O₄ (MCNO) thin films grown on Al₂O₃ substrate by chemical solution deposition were investigated. The MCNO bolometer sized 300×160 μm² were fabricated by photolithography process followed by wet etching, and the temperature coefficient of resistance reaches -3.81 %K^-1 @296 K. Relatively low excess noise was achieved due to the good quality of fabrication process, and the normalized noise power γ/n was found to be 1.8×10^-21 cm³ at 296 K. Through black coating the performances for MCNO bolometer, operating at room temperature, are greatly improved and exhibit responsivity of over 354 V/W, detectivity of approximated 4.5×10⁷ cmHz^1/2/W@10Hz at ±16 V, and the thermal time constant of about 18 ms. These experiment results indicate that the infrared detection ability of MCNO thin film bolometer is significantly enhanced comparing with bulk devices.

Citation Download Citation

Ouyang Cheng, Wei Zhou, Jing Wu, Junhao Chu, and Zhiming Huang "Fabrication and performance of uncooled infrared bolometer based on Mn_1.56Co_0.96Ni_0.48O₄ thin films", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90681K (16 December 2013); https://doi.org/10.1117/12.2051725

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available