We developed CMOS SPAD imagers with 150 μm pixel pitch and 30 μm SPADs. A 64×32 SPAD array is based on pixels including three 9-bit counters for smart phase-resolved photon counting up to 100 kfps. A 32x32 SPAD array includes 1024 10-bit Time-to-Digital Converters (TDC) with 300 ps resolution and 450 ps single-shot precision, for 3D ranging and FLIM. We developed also linear arrays with up to 60 pixels (with 100 μm SPAD, 150 μm pitch and in-pixel 250 ps TDC) for time-resolved parallel spectroscopy with high fill factor. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
CITATIONS
Cited by 4 scholarly publications.
Picosecond phenomena
Clocks
Cameras
Photodetectors
Ranging
Sensors
Electronics