Paper
5 September 2014 Phase delay characterization of multilayer coatings for FEL applications
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Abstract
The phase delay induced by multilayer (ML) mirrors is an important feature in many fields such as attosecond pulses compression, photolithography or in pump and probe experiments performed with Free Electron Laser (FEL) pulses. The experimental characterization of the ML phase delay can be obtained by the standing wave distribution measurement (by using Total Electron Yield (TEY) signal) combined to reflectance measurement. In this work, a ML structure with aperiodic capping-layers was designed and deposited for FEL applications and their reflectance and phase delay was characterized. The method adopted allows to retrieve the ML phase delay by using the TEY signals taken at different working configurations and it doesn’t require the comparison with a bulk reference sample. The results obtained are presented and discussed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alain J. Corso, Enrico Tessarolo, Paola Zuppella, Sara Zuccon, Marco Nardello, and Maria G. Pelizzo "Phase delay characterization of multilayer coatings for FEL applications", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070M (5 September 2014); https://doi.org/10.1117/12.2061818
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Cited by 1 scholarly publication.
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KEYWORDS
Reflectivity

Free electron lasers

Multilayers

Extreme ultraviolet

Phase measurement

Interfaces

Mirrors

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