A high-reflective surface measurement method based on conoscopic holography technology

Xu Cheng; ZhongWei Li; YuSheng Shi; HengShuang Zhao; Guomin Zhan

doi:10.1117/12.2071706

13 November 2014 A high-reflective surface measurement method based on conoscopic holography technology

Xu Cheng, ZhongWei Li, YuSheng Shi, HengShuang Zhao, Guomin Zhan

Proceedings Volume 9276, Optical Metrology and Inspection for Industrial Applications III; 927608 (2014) https://doi.org/10.1117/12.2071706
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Measuring high-reflective surfaces using optical method is always a big challenging problem. This paper presents a high-reflective surface measurement method based on conoscopic holography technology using a 4D motion platform equipped with a conoscopic holography optical probe. There are two key problems needed to solve before the automate scan of the complex shape surface: the coordinate calibration and the path planning. To improve the calibration efficiency and accuracy, the coordinate calibration is divided into two parts: the rough calibration and the accurate registration. The path planning consists of two aspects including: the path points generation and the path points verification. In addition, by scanning the objects having high-reflective surfaces, such as the metal blades, coins and other work-pieces, the efficiency of the measurement method has been verified.

Citation Download Citation

Xu Cheng, ZhongWei Li, YuSheng Shi, HengShuang Zhao, and Guomin Zhan "A high-reflective surface measurement method based on conoscopic holography technology", Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927608 (13 November 2014); https://doi.org/10.1117/12.2071706

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