Paper
6 August 2014 Design of a vertical ultra-precision linear axis modular driven by dual linear motors
Enbing Qi, Zhenyong Fang, Tao Sun, Bo Wang
Author Affiliations +
Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 928129 (2014) https://doi.org/10.1117/12.2069462
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
Non-rotational symmetric surface machining requires at least three numerically controlled axes, so there exists a desperately need of an ultra-precision vertical linear axis for ultra-precision machine tools. Based on the above consideration, a vertical ultra-precision linear axis has been developed to satisfy the need for non-rotational symmetric surface ultra-precision machining. The paper discusses the design challenges of the vertical ultra-precision linear axis and presents the mechanical structure designed with dual linear motor drive. A guide component and a gravity compensation mechanism have been designed. Finite element models for the vertical ultra-precision were established to evaluate the dynamic performance of the vertical ultra-precision linear axis. Analysis results show that the configuration of the vertical ultra-precision linear axis is reasonable with good dynamic performance.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Enbing Qi, Zhenyong Fang, Tao Sun, and Bo Wang "Design of a vertical ultra-precision linear axis modular driven by dual linear motors", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 928129 (6 August 2014); https://doi.org/10.1117/12.2069462
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KEYWORDS
Finite element methods

Control systems

Structural design

Mechanical engineering

Optics manufacturing

Computer programming

Lithium

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